FEATURES OF THE TECHNOLOGICAL PROCESS OF MANUFACTURING SPACE-BASED MICROCHIPS USING CMOS KNS TECHNOLOGY

V. Zolnikov; Svetlana A. Evdokimova; Irina ZHuravlyeva; Elena Maklakova; Anna A. Ilunina

doi:10.12737/2219-0767-2020-13-3-53-58

UDC 60

FEATURES OF THE TECHNOLOGICAL PROCESS OF MANUFACTURING SPACE-BASED MICROCHIPS USING CMOS KNS TECHNOLOGY

Published in Modeling of systems and processes · Volume 13, Issue 3 · Pages 53–58 · Rubric: Tehnicheskie nauki

DOI: https://doi.org/10.12737/2219-0767-2020-13-3-53-58

Received: 07.12.2020 Accepted: 24.03.2024

Authors

V. Zolnikov

Svetlana A. Evdokimova

Irina ZHuravlyeva

Elena Maklakova

et al.

Anna A. Ilunina

V. Zolnikov

Voronezh State University of Forestry and Technologies named after G.F. Morozov Voronezh

Svetlana A. Evdokimova

Academic degree: candidate of technical sciences

Voronezh State University of Forestry and Technologies named after G.F. Morozov Voronezh

Irina ZHuravlyeva

Elena Maklakova

Voronezh State University of Forestry and Technologies named after G.F. Morozov Voronezh

Anna A. Ilunina

Voronezh State University of Forestry and Technologies named after G.F. Morozov Voronezh

ABSTRACT

The article deals with the technological process of manufacturing CMOS integrated circuits on KNS (silicon on sapphire) structures for space purposes. The technology is based on an n-type CMOS process with one level of polysilicon and two levels of metal. The components of the technological process are analyzed. The sequence of the technological process and its features are given. An example of a description of one of the elements is considered.

KEYWORDS

VLSI, space-based microchips, CMOS technology, silicon on sapphire (SSC), technological route, design

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JATS XML

Editor-in-Chief, editorial board chair

GOST

Zolnikov V. K., Evdokimova S. A., ZHuravlyeva I., Maklakova E. A., Ilunina A. A. FEATURES OF THE TECHNOLOGICAL PROCESS OF MANUFACTURING SPACE-BASED MICROCHIPS USING CMOS KNS TECHNOLOGY // Modeling of systems and processes. 2020. no. 3. pp. 53-58. DOI: https://doi.org/10.12737/2219-0767-2020-13-3-53-58. (Date of access 20.09.2026).

MLA

V. Zolnikov, Evdokimova S. A., ZHuravlyeva I., Maklakova E. A., Ilunina A. A.. "FEATURES OF THE TECHNOLOGICAL PROCESS OF MANUFACTURING SPACE-BASED MICROCHIPS USING CMOS KNS TECHNOLOGY." Modeling of systems and processes 13.3 (2020): 53-58. DOI: https://doi.org/10.12737/2219-0767-2020-13-3-53-58.

APA

Zolnikov V. K., Evdokimova S. A., ZHuravlyeva I., Maklakova E. A., Ilunina A. A. (2020). FEATURES OF THE TECHNOLOGICAL PROCESS OF MANUFACTURING SPACE-BASED MICROCHIPS USING CMOS KNS TECHNOLOGY. Modeling of systems and processes, 13(3), 53-58. https://doi.org/10.12737/2219-0767-2020-13-3-53-58

Chicago

V. Zolnikov, Evdokimova S. A., ZHuravlyeva I., Maklakova E. A., Ilunina A. A.. "FEATURES OF THE TECHNOLOGICAL PROCESS OF MANUFACTURING SPACE-BASED MICROCHIPS USING CMOS KNS TECHNOLOGY." Modeling of systems and processes 13, no. 3 (2020): 53-58. https://doi.org/10.12737/2219-0767-2020-13-3-53-58.

WIKI

{{cite journal | author = Zolnikov V. K., Evdokimova S. A., ZHuravlyeva I., Maklakova E. A., Ilunina A. A. | title = FEATURES OF THE TECHNOLOGICAL PROCESS OF MANUFACTURING SPACE-BASED MICROCHIPS USING CMOS KNS TECHNOLOGY | journal = Modeling of systems and processes | year = 2020 | volume = 13 | issue = 3 | pages = 53-58 | doi = 10.12737/2219-0767-2020-13-3-53-58 }}

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FEATURES OF THE TECHNOLOGICAL PROCESS OF MANUFACTURING SPACE-BASED MICROCHIPS USING CMOS KNS TECHNOLOGY

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