Представлена оптическая схема профилографа, сканирующего голографическое изображение объекта в видимом интервале электромагнитных волн и позволяющего получить характеристики поверхности для структурирования ее трехмерной модели на основе модульногеометрического подхода, а также схема рентгенопрофилографа активного контроля над процессом формирования микрорельефа поверхности.
One of the ways allowing the increase of accuracy and control devices potentialities consists in the use of system complexes investigating a holographic image of an object under control. The design peculiarities of system complexes of this set allow using module-geometrical approach for the simulation of a surface investigated. The modulegeometrical approach allows, in its turn, obtaining the topography of a microrelief with an analytical description and conservation of a natural surface curvature and also a threedimensional model of an aerohydrodynamic surface with a complex shape which is a smooth module connection having also an analytical presentation. To obtain a holographic image of an object which allows fixing geometrical characteristics in a nanointerval are used the circuits of image recording through Leight-Upatnieks method. There is developed and approbated an optical circuit of a profilograph scanning a holographic image of an object in a visible interval of electro-magnetic waves and allowing the reception of surface characteristic for structuring its threedimensional model on the basis of a modulegeometrical approach. The circuit of a roentgenoprofilograph for active control of microrelief formation is developed.