00608naa#a2200181#i#450# EN\\bibl\99299 20260321124227.6 2223-4608 20250530b2025####ek#y0engy0150####ca RU Development of pulsed laser deposition process in nanodimentional structures Journal article Bryansk Bryansk State Technical University 2025 6 с. Journal article local испарением и конденсацией. 539.234 Shupenev Alexandr Evgenievich Grigoryants Aleksandr G. naukaru.ru