LDR 00600naa#a2200181#i#450#
001     EN\\bibl\8359
005     20260222085517.7
011 ## _a2308-8877
100 ## _a20151210b2015####ek#y0engy0150####ca
101 0# _aRUS
102 ## _aRU
200 1# _aHeat treatment of the silicon: modifying surface morphology
       _eJournal article
210 1# _aVoronezh
       _cFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov
       _d2015
215 ## _a4 с.
608 ## _aJournal article
       _2local
700 #1 _aKozlovskiy
       _gArtem 
700 #1 _aKaliekperov
       _gMalik 
856 4# _anaukaru.ru
       _u