00866naa#a2200193#i#450# EN\\bibl\64984 20241011071007.5 2219-0767 20230614b2023####ek#y0engy0150####ca RU Verilog-A model of the impurity freeze-out in LDD regions at cryogenic temperatures Journal article Voronezh FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov 2023 7 с. Journal article local Электронные элементы, использующие свойства твердого тела. Полупроводниковая электроника. 621.382 Osykin Andrey Aleksandrovich Potupchik Aleksandr Georgievich Panyshev Kirill Andreevich naukaru.ru