LDR 00866naa#a2200193#i#450#
001     EN\\bibl\64984
005     20241011070948.5
011 ## _a2219-0767
100 ## _a20230614b2023####ek#y0engy0150####ca
102 ## _aRU
200 1# _aVerilog-A model of the impurity freeze-out in LDD regions at cryogenic temperatures
       _eJournal article
210 1# _aVoronezh
       _cFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov
       _d2023
215 ## _a7 с.
608 ## _aJournal article
       _2local
675 ## _aЭлектронные элементы, использующие свойства твердого тела. Полупроводниковая электроника. 621.382
       _z
700 #1 _aOsykin
       _gAndrey Aleksandrovich
700 #1 _aPotupchik
       _gAleksandr Georgievich
700 #1 _aPanyshev
       _gKirill Andreevich
856 4# _anaukaru.ru
       _u