00697naa#a2200205#i#450# EN\\bibl\6427 20240513232621.1 2219-0767 20150702b2015####ek#y0engy0150####ca RUS RU ALGORITHMIC BASIS OF MODELING FAILURES IN DEEP-SUBMICRON TECHNOLOGIES Journal article Voronezh FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov 2015 2 с. Journal article local Chubur K. A. Yankov A. Il'ich Zolnikov Konstantin Vladimirovich Achkasov A. Vladimirovich naukaru.ru