00606naa#a2200205#i#4500001001300000005001700013011001400030100004100044101000800085102000700093200011500100210005600215215001000271608002700281700001500308700002000323700002200343700002000365856001500385EN\\bibl\56920240913172805.5##a1992-5980##a20130930b2013####ek#y0engy0150####ca0#aRUS##aRU1#aDerivatization of photoactive structures Si(n+)/Si(p)/Si(p+) through ion-beam crystallizationeJournal article1#arostov on doncDon state technical Universityd2013##a7 с.##aJournal article2local#1aIrkhagV. #1aChebotarevgS. #1aVaravkagValeriy #1aPashchenkogA. 4#anaukaru.ru