00993naa#a2200241#i#4500001001500000005001700015011001400032100004100046102000700087200010000094210013700194215001100331608002700342675014600369700003100515700003400546700003400580700003500614700002000649700003500669700003200704856001500736EN\\bibl\5548720240510232600.5##a2219-0767##a20221213b2022####ek#y0engy0150####ca##aRU1#aFeatures of the design of microcircuits made using deep-submicron technologieseJournal article1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2022##a10 с.##aJournal article2local##aПрикладные информационные (компьютерные) технологии. 004.9aЭлектротехника. 621.3#1aAchkasovgA. Vladimirovich#1aSolodilovgMaksim Vital'evich#1aLitvinovgNikolay Nikolaevich#1aChubunovgPavel Aleksandrovich#1aZolnikovgV. K.#1aShehovcovgDmitriy Vital'evich#1aBordyuzhagOleg Leonidovich4#anaukaru.ru