LDR 00993naa#a2200241#i#450#
001     EN\\bibl\55487
005     20240509230815.4
011 ## _a2219-0767
100 ## _a20221213b2022####ek#y0engy0150####ca
102 ## _aRU
200 1# _aFeatures of the design of microcircuits made using deep-submicron technologies
       _eJournal article
210 1# _aVoronezh
       _cFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov
       _d2022
215 ## _a10 с.
608 ## _aJournal article
       _2local
675 ## _aПрикладные информационные (компьютерные) технологии. 004.9
       _aЭлектротехника. 621.3
       _z
700 #1 _aAchkasov
       _gA. Vladimirovich
700 #1 _aSolodilov
       _gMaksim Vital'evich
700 #1 _aLitvinov
       _gNikolay Nikolaevich
700 #1 _aChubunov
       _gPavel Aleksandrovich
700 #1 _aZolnikov
       _gV. K.
700 #1 _aShehovcov
       _gDmitriy Vital'evich
700 #1 _aBordyuzha
       _gOleg Leonidovich
856 4# _anaukaru.ru
       _u