LDR 00993naa#a2200241#i#450# 001 EN\\bibl\55487 005 20241114050046.4 011 ## _a2219-0767 100 ## _a20221213b2022####ek#y0engy0150####ca 102 ## _aRU 200 1# _aFeatures of the design of microcircuits made using deep-submicron technologies _eJournal article 210 1# _aVoronezh _cFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov _d2022 215 ## _a10 с. 608 ## _aJournal article _2local 675 ## _aПрикладные информационные (компьютерные) технологии. 004.9 _aЭлектротехника. 621.3 _z 700 #1 _aAchkasov _gA. Vladimirovich 700 #1 _aSolodilov _gMaksim Vital'evich 700 #1 _aLitvinov _gNikolay Nikolaevich 700 #1 _aChubunov _gPavel Aleksandrovich 700 #1 _aZolnikov _gV. K. 700 #1 _aShehovcov _gDmitriy Vital'evich 700 #1 _aBordyuzha _gOleg Leonidovich 856 4# _anaukaru.ru _u