00648naa#a2200193#i#450# EN\\bibl\4867 20241204030857.3 2219-0767 20150224b2015####ek#y0engy0150####ca RUS RU SELECTION OF OPTIMAL RUN ON SEMICONDUCTOR MANUFACTURING PROCESS STEPS Journal article Voronezh FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov 2015 2 с. Journal article local Lemeshkin A. V. Akamsina N. V. Serbulov Yuriy Stefanovich naukaru.ru