00648naa#a2200193#i#4500001001400000005001700014011001400031100004100045101000800086102000700094200009100101210013700192215001000329608002700339700002100366700002000387700003200407856001500439EN\\bibl\486720241204030345.3##a2219-0767##a20150224b2015####ek#y0engy0150####ca0#aRUS##aRU1#aSELECTION OF OPTIMAL RUN ON SEMICONDUCTOR MANUFACTURING PROCESS STEPSeJournal article1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2015##a2 с.##aJournal article2local#1aLemeshkingA. V.#1aAkamsinagN. V.#1aSerbulovgYuriy Stefanovich4#anaukaru.ru