LDR 00648naa#a2200193#i#450#
001     EN\\bibl\4867
005     20241204030017.3
011 ## _a2219-0767
100 ## _a20150224b2015####ek#y0engy0150####ca
101 0# _aRUS
102 ## _aRU
200 1# _aSELECTION OF OPTIMAL RUN ON SEMICONDUCTOR MANUFACTURING PROCESS STEPS
       _eJournal article
210 1# _aVoronezh
       _cFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov
       _d2015
215 ## _a2 с.
608 ## _aJournal article
       _2local
700 #1 _aLemeshkin
       _gA. V.
700 #1 _aAkamsina
       _gN. V.
700 #1 _aSerbulov
       _gYuriy Stefanovich
856 4# _anaukaru.ru
       _u