00658naa#a2200181#i#4500001001500000005001700015011001400032100004100046102000700087200007200094210013700166215001000303608002700313675006700340700002200407700003200429856001500461EN\\bibl\4593120241127172209.3##a2219-0767##a20210922b2021####ek#y0engy0150####ca##aRU1#aTechnologies for creating radiation-resistant VLSIeJournal article1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2021##a6 с.##aJournal article2local##aПрикладные науки. Общие вопросы. 60#1aZhuravlevagI. V.#1aPopovagElena Aleksandrovna4#anaukaru.ru