00839naa#a2200217#i#450# EN\\bibl\41062 20240510022831.5 2219-0767 20201207b2020####ek#y0engy0150####ca RU FEATURES OF THE TECHNOLOGICAL PROCESS OF MANUFACTURING SPACE-BASED MICROCHIPS USING CMOS KNS TECHNOLOGY Journal article Voronezh FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov 2020 5 с. Journal article local Прикладные науки. Общие вопросы. 60 Zolnikov V. K. Evdokimova Svetlana Anatol'evna ZHuravlyeva Irina Maklakova Elena Al'bertovna Ilunina Anna Aleksandrovna naukaru.ru