00839naa#a2200217#i#4500001001500000005001700015011001400032100004100046102000700087200012500094210013700219215001000356608002700366675006700393700002000460700003700480700002400517700003300541700003200574856001500606EN\\bibl\4106220240510080244.5##a2219-0767##a20201207b2020####ek#y0engy0150####ca##aRU1#aFEATURES OF THE TECHNOLOGICAL PROCESS OF MANUFACTURING SPACE-BASED MICROCHIPS USING CMOS KNS TECHNOLOGYeJournal article1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2020##a5 с.##aJournal article2local##aПрикладные науки. Общие вопросы. 60#1aZolnikovgV. K.#1aEvdokimovagSvetlana Anatol'evna#1aZHuravlyevagIrina #1aMaklakovagElena Al'bertovna#1aIluninagAnna Aleksandrovna4#anaukaru.ru