LDR 00839naa#a2200217#i#450# 001 EN\\bibl\41062 005 20241114053716.4 011 ## _a2219-0767 100 ## _a20201207b2020####ek#y0engy0150####ca 102 ## _aRU 200 1# _aFEATURES OF THE TECHNOLOGICAL PROCESS OF MANUFACTURING SPACE-BASED MICROCHIPS USING CMOS KNS TECHNOLOGY _eJournal article 210 1# _aVoronezh _cFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov _d2020 215 ## _a5 с. 608 ## _aJournal article _2local 675 ## _aПрикладные науки. Общие вопросы. 60 _z 700 #1 _aZolnikov _gV. K. 700 #1 _aEvdokimova _gSvetlana Anatol'evna 700 #1 _aZHuravlyeva _gIrina 700 #1 _aMaklakova _gElena Al'bertovna 700 #1 _aIlunina _gAnna Aleksandrovna 856 4# _anaukaru.ru _u