LDR 00895naa#a2200217#i#450#
001     EN\\bibl\37765
005     20241116094833.6
011 ## _a2219-0767
100 ## _a20200526b2020####ek#y0engy0150####ca
102 ## _aRU
200 1# _aDEVELOPMENT OF THE DESIGN ENVIRONMENT AND ASSESSMENT OF THE MANUFACTURABILITY OF THE CHIP PRODUCTION TAKING INTO ACCOUNT THE RESISTANCE TO SPECIAL FACTORS ON THE EXAMPLE OF VLSI 1867VTS6F
       _eJournal article
210 1# _aVoronezh
       _cFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov
       _d2020
215 ## _a5 с.
608 ## _aJournal article
       _2local
675 ## _aПрикладные науки. Общие вопросы. 60
       _z
700 #1 _aSklyar
       _gV. 
700 #1 _aSmerek
       _gV. 
700 #1 _aZolnikov
       _gKonstantin Vladimirovich
700 #1 _aChernov
       _gD. N.
700 #1 _aYagodkin
       _gA. Sergeevich
856 4# _anaukaru.ru
       _u