LDR 00582naa#a2200169#i#450# 001 EN\\bibl\3730 005 20240511204435.6 011 ## _a2219-0767 100 ## _a20141030b2014####ek#y0engy0150####ca 101 0# _aRUS 102 ## _aRU 200 1# _aMODELING OF VLSI ELEMENTS OF CIRCUIT ON LEVEL ON EXPOSURE HCP _eJournal article 210 1# _aVoronezh _cFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov _d2014 215 ## _a2 с. 608 ## _aJournal article _2local 700 #1 _aZolnikov _gKonstantin Vladimirovich 856 4# _anaukaru.ru _u