00605naa#a2200169#i#4500001001400000005001700014011001400031100004100045101000800086102000700094200010600101210013700207215001000344608002700354700003900381856001500420EN\\bibl\372920240511103032.6##a2219-0767##a20141030b2014####ek#y0engy0150####ca0#aRUS##aRU1#aMATHEMATICAL RATIOS TO IONIZATION CURRENT CORRESPONDS TO A DEEP-SUBMICRON TECHNOLOGYeJournal article1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2014##a3 с.##aJournal article2local#1aZolnikovgKonstantin Vladimirovich4#anaukaru.ru