00728naa#a2200193#i#4500001001500000005001700015011001400032100004100046102000700087200012600094210013700220215001000357608002700367675006700394700002000461700002300481700001500504856001500519EN\\bibl\3031720240426154259.5##a2219-0767##a20190826b2019####ek#y0engy0150####ca##aRU1#aREVIEW OF SUBMICRON VLSI CAD SOFTWARE AND ACCOUNTING FOR ELECTROPHYSICAL EFFECTS OF DEEP SUBMICRON LEVELeJournal article1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2019##a7 с.##aJournal article2local##aПрикладные науки. Общие вопросы. 60#1aZolnikovgV. K.#1aSavchenkogAndrey #1aKulaygA. 4#anaukaru.ru