LDR 00728naa#a2200193#i#450#
001     EN\\bibl\30317
005     20240419142142.5
011 ## _a2219-0767
100 ## _a20190826b2019####ek#y0engy0150####ca
102 ## _aRU
200 1# _aREVIEW OF SUBMICRON VLSI CAD SOFTWARE AND ACCOUNTING FOR ELECTROPHYSICAL EFFECTS OF DEEP SUBMICRON LEVEL
       _eJournal article
210 1# _aVoronezh
       _cFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov
       _d2019
215 ## _a7 с.
608 ## _aJournal article
       _2local
675 ## _aПрикладные науки. Общие вопросы. 60
       _z
700 #1 _aZolnikov
       _gV. K.
700 #1 _aSavchenko
       _gAndrey 
700 #1 _aKulay
       _gA. 
856 4# _anaukaru.ru
       _u