00667naa#a2200193#i#450# EN\INFRA-M\bibl\29966 20240502112734.4 2500-3313 20190716b2019####ek#y0engy0150####ca RUS RU Development of an automated process control system for grinding silicon carbide Journal article Moscow INFRA-M Academic Publishing LLC. 2019 3 с. Journal article local Инженерное дело. Техника в целом. Транспорт. 62 RUS Rybal'chenko Nikita Vladimirovich Silaeva Elena Yur'evna naukaru.ru