00820naa#a2200217#i#4500001001500000005001700015011001400032100004100046102000700087200008300094210008500177215001000262608002700272675014000299700003100439700003100470700003200501700003100533700002300564856001500587EN\\bibl\2975420240514072820.2##a2071-7318##a20160225b2016####ek#y0engy0150####ca##aRU1#aGROWTH OF LOW DISLOCATION GaN AND AlGaN layers by ammonia mbeeJournal article1#aBelgorodcBelgorod State Technological University named after V.G. Shukhovd2016##a4 с.##aJournal article2local##aХимическая технология. Химическая промышленность. Родственные отрасли. 66#1aMamaevgViktor Viktorovich#1aNovikovgSergey Andreevich#1aPetrovgStanislav Igorevich#1aZaycevgSergey Viktorovich#1aProhorenkovgD. S.4#anaukaru.ru