00569naa#a2200193#i#450# EN\\bibl\13540 20260525132926.1 1999-8775 20160930b2016####ek#y0engy0150####ca RUS RU OPTICAL CIRCUITS OF HOLOGRAPHIC CONTROL PLANT OF MICRORELIEF FORMATION PROCESS Journal article Bryansk Bryansk State Technical University 2016 8 с. Journal article local Poyarkov Vyacheslav Belkin Evgeniy Markov Oleg naukaru.ru