00842naa#a2200193#i#450# EN\\bibl\120333 20260526070920.2 2219-0767 20260424b2026####ek#y0engy0150####ca RU Designing radiation-resistant multilayer MEMS covers taking into account thermomechanical limitations Journal article Voronezh FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov 2026 16 с. Journal article local Общее машиностроение. Ядерная техника. Электротехника. Технология машиностроения в целом. 621 Ivanin Pavel Sergeevich Gusev E. E. Dyuzhev N. A. naukaru.ru