00842naa#a2200193#i#4500001001600000005001700016011001400033100004100047102000700088200012300095210013700218215001100355608002700366675017500393700002900568700001700597700001900614856001500633EN\\bibl\12033320260525190322.1##a2219-0767##a20260424b2026####ek#y0engy0150####ca##aRU1#aDesigning radiation-resistant multilayer MEMS covers taking into account thermomechanical limitationseJournal article1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2026##a16 с.##aJournal article2local##aОбщее машиностроение. Ядерная техника. Электротехника. Технология машиностроения в целом. 621#1aIvaningPavel Sergeevich#1aGusevgE. E.#1aDyuzhevgN. A.4#anaukaru.ru