LDR 00842naa#a2200193#i#450#
001     EN\\bibl\120333
005     20260526010131.2
011 ## _a2219-0767
100 ## _a20260424b2026####ek#y0engy0150####ca
102 ## _aRU
200 1# _aDesigning radiation-resistant multilayer MEMS covers taking into account thermomechanical limitations
       _eJournal article
210 1# _aVoronezh
       _cFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov
       _d2026
215 ## _a16 с.
608 ## _aJournal article
       _2local
675 ## _aОбщее машиностроение. Ядерная техника. Электротехника. Технология машиностроения в целом. 621
       _z
700 #1 _aIvanin
       _gPavel Sergeevich
700 #1 _aGusev
       _gE. E.
700 #1 _aDyuzhev
       _gN. A.
856 4# _anaukaru.ru
       _u