LDR 00769naa#a2200193#i#450# 001 EN\\bibl\105058 005 20260131042834.6 011 ## _a2219-0767 100 ## _a20251016b2025####ek#y0engy0150####ca 102 ## _aRU 200 1# _aMultiphysical modeling of microelectronic systems with heterogeneous integration _eJournal article 210 1# _aVoronezh _cFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov _d2025 215 ## _a7 с. 608 ## _aJournal article _2local 675 ## _aПрикладные информационные (компьютерные) технологии. 004.9 _z 700 #1 _aAchkasov _gA. Vladimirovich 700 #1 _aYagodkin _gA. Sergeevich 700 #1 _aMakarenko _gF. V. 856 4# _anaukaru.ru _u