%0 Journal Article
%T Development of pulsed laser deposition process  in nanodimentional structures
%A Shupenev, A.E.
%A Grigoryants, A.G.
%K pulsed laser deposition, thin films, diamond-like structures, high-temperature superconductor, film thermoelectric element, topological insulator
%J Science intensive technologies in mechanical engineering
%D 2025
%N 2025
%P 6
%I Bryansk State Technical University