TY  JOUR
TI  APPLYING SCANNING ELECTRON MICROSCOPY IN REVERSE ENGINEERING OF ELECTRONIC COMPONENT BASE
KW  scanning electron microscopy
KW  section
KW  gate dielectric
KW  busbar
KW  dustiness coefficient
KW  reverse engineering
JO  Automation and modeling in design and management
AU  Malakhanov, A.A.
AU  Pugachev, A.A.
AU  Markova, V.K.
PY  2024
IS  2024
PB  Bryansk State Technical University