%0 Journal Article %T Causes of damage to the metallization of integrated circuits in terms of currents of high density %A Vrabiy, E.. %A Alekseev, V.. %A Piskun, G.. %A Degalevich, D.. %K damage, failure, metallization, electrodiffusive, reliability, electrostatic discharge (ESD) %J Actual directions of scientific researches of the XXI century: theory and practice %D 2015 %N 3 %P 4 %I FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov