TY JOUR TI Features of the design of microcircuits made using deep-submicron technologies KW VLSI KW deep submicron technologies KW design KW radio electronic products KW spacecraft JO Modeling of systems and processes AU Achkasov, A.V. AU Solodilov, M.V. AU Litvinov, N.N. AU Chubunov, P.A. AU Zolnikov, V.K. AU Shehovcov, D.V. AU Bordyuzha, O.L. PY 2022 IS 15 PB FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov