TY  JOUR
TI  Overview of methods for measuring the mechanical strength of thin films
KW  Mechanical properties
KW  strength
KW  yield strength
KW  mechanical stresses
KW  Young's modulus
KW  grain size
KW  material fatigue
KW  thin films
KW  defects
KW  deformation
KW  MEMS
JO  Modeling of systems and processes
AU  Bespalov, V.A.
AU  Tovarnov, D.A.
AU  Dyuzhev, N.A.
AU  Mahiboroda, M.A.
AU  Gusev, E.E.
AU  Zolnikov, K.V.
PY  2022
IS  15
PB  FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov