%0 Journal Article
%T Overview of methods for measuring the mechanical strength of thin films
%A Bespalov, V.A.
%A Tovarnov, D.A.
%A Dyuzhev, N.A.
%A Mahiboroda, M.A.
%A Gusev, E.E.
%A Zolnikov, K.V.
%K Mechanical properties, strength, yield strength, mechanical stresses, Young's modulus, grain size, material fatigue, thin films, defects, deformation, MEMS
%J Modeling of systems and processes
%D 2022
%N 15
%P 18
%I FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov