TY  JOUR
TI  SELECTION OF OPTIMAL RUN ON SEMICONDUCTOR MANUFACTURING PROCESS STEPS
KW  choice
KW  the optimal launch
KW  dynamic programming
KW  process operation
KW  ways of connecting process sequence
JO  Modeling of systems and processes
AU  Lemeshkin, A.V.
AU  Akamsina, N.V.
AU  Serbulov, Y.S.
PY  2015
IS  7
PB  FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov