%0 Journal Article
%T SELECTION OF OPTIMAL RUN ON SEMICONDUCTOR MANUFACTURING PROCESS STEPS
%A Lemeshkin, A.V.
%A Akamsina, N.V.
%A Serbulov, Y.S.
%K choice, the optimal launch, dynamic programming, process operation, ways of connecting process sequence
%J Modeling of systems and processes
%D 2015
%N 7
%P 2
%I FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov