@article{Lemeshkin2015selection,
author={Lemeshkin, A.V. and Akamsina, N.V. and Serbulov, Y.S.},
title={SELECTION OF OPTIMAL RUN ON SEMICONDUCTOR MANUFACTURING PROCESS STEPS},
journal={Modeling of systems and processes},
publisher={FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov},
year={2015},
pages={4-6},
volume={7},
issue={4},
}