TY  JOUR
TI  FEATURES OF THE TECHNOLOGICAL PROCESS OF MANUFACTURING SPACE-BASED MICROCHIPS USING CMOS KNS TECHNOLOGY
KW  VLSI
KW  space-based microchips
KW  CMOS technology
KW  silicon on sapphire (SSC)
KW  technological route
KW  design
JO  Modeling of systems and processes
AU  Zolnikov, V.K.
AU  Evdokimova, S.A.
AU  ZHuravlyeva, I..
AU  Maklakova, E.A.
AU  Ilunina, A.A.
PY  2020
IS  13
PB  FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov