%0 Journal Article %T FEATURES OF THE TECHNOLOGICAL PROCESS OF MANUFACTURING SPACE-BASED MICROCHIPS USING CMOS KNS TECHNOLOGY %A Zolnikov, V.K. %A Evdokimova, S.A. %A ZHuravlyeva, I.. %A Maklakova, E.A. %A Ilunina, A.A. %K VLSI, space-based microchips, CMOS technology, silicon on sapphire (SSC), technological route, design %J Modeling of systems and processes %D 2020 %N 13 %P 5 %I FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov