TY JOUR TI REVIEW OF SUBMICRON VLSI CAD SOFTWARE AND ACCOUNTING FOR ELECTROPHYSICAL EFFECTS OF DEEP SUBMICRON LEVEL KW JO Modeling of systems and processes AU Zolnikov, V.K. AU Savchenko, A.. AU Kulay, A.. PY 2019 IS 12 PB FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov