%0 Journal Article %T REVIEW OF SUBMICRON VLSI CAD SOFTWARE AND ACCOUNTING FOR ELECTROPHYSICAL EFFECTS OF DEEP SUBMICRON LEVEL %A Zolnikov, V.K. %A Savchenko, A.. %A Kulay, A.. %K %J Modeling of systems and processes %D 2019 %N 12 %P 7 %I FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov