@article{Zolnikov2019review, author={Zolnikov, V.K. and Savchenko, A.. and Kulay, A..}, title={REVIEW OF SUBMICRON VLSI CAD SOFTWARE AND ACCOUNTING FOR ELECTROPHYSICAL EFFECTS OF DEEP SUBMICRON LEVEL}, journal={Modeling of systems and processes}, publisher={FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov}, year={2019}, pages={40-47}, volume={12}, issue={1}, }