TY JOUR TI Studying the possibilities of the application of MarSurf Xr20 installation for fractal surface analysis KW fractal analysis KW MarSurf XR 20 setup KW scanning probe microscope KW Hurst method KW fractal dimension JO Journal of Technical Research AU Ivleva, D.M. AU Bavykin, O.B. PY 2019 IS 5 PB INFRA-M Academic Publishing LLC.