%0 Journal Article
%T Designing radiation-resistant multilayer MEMS covers taking into account thermomechanical limitations
%A Ivanin, P.S.
%A Gusev, E.E.
%A Dyuzhev, N.A.
%K microelectromechanical systems, mechanical reliability, multilayer cover, design of radiation-resistant protective covers of MEMS devices, thermoelastic stresses, ionizing radiation from outer space
%J Modeling of systems and processes
%D 2026
%N 19
%P 16
%I FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov